Influence of the hydrogen content on the physical properties of magnetron sputtered amorphous silicon
- 1 December 1985
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 77-78, 269-272
- https://doi.org/10.1016/0022-3093(85)90655-6
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
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- Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputteringPhysical Review B, 1977
- Use of hydrogenation in structural and electronic studies of gap states in amorphous germaniumPhysical Review B, 1976