Identification of plasma-sheath resonances in a parallel-plate plasma reactor
- 15 May 1995
- journal article
- research article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 77 (10) , 5455-5457
- https://doi.org/10.1063/1.359242
Abstract
A new, unexpected resonance has been observed in radio frequency, parallel plate plasma reactors. It has been explained using a linear model by analogy with the series resonance of probes. This discovery may be used in different ways; as a diagnostic, to measure the plasma density with high accuracy and, possibly, in improving the plasma performance in the low‐pressure range.This publication has 4 references indexed in Scilit:
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