Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge
- 1 July 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (7R) , 1322-1323
- https://doi.org/10.1143/jjap.29.1322
Abstract
Chlorine/hydrogen discharge cleaning was developed to remove boron films coated on walls of nuclear fusion devices. The removal rate of boron films (∼0.1 Å/s) was an order of magnitude faster than that obtained by conventional hydrogen discharges. Mass spectroscopic measurement revealed that BCl3 is a main volatile product in the removal process. Chlorine contaminants after film removal were cleaned up by additional hydrogen discharges.Keywords
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