Porous silicon as a material in microsensor technology
- 1 May 1992
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 33 (1-2) , 19-24
- https://doi.org/10.1016/0924-4247(92)80218-r
Abstract
No abstract availableKeywords
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- Anodic dissolution of silicon in hydrofluoric acid solutionsSurface Science, 1966