The gate oxide lifetime limited by `B-mode' stress induced leakage current and the scaling limit of silicon dioxides in the direct tunnelling regime
- 1 May 2000
- journal article
- Published by IOP Publishing in Semiconductor Science and Technology
- Vol. 15 (5) , 478-484
- https://doi.org/10.1088/0268-1242/15/5/307
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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