A Hybrid Silicon–AlGaInAs Phase Modulator
- 31 October 2008
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 20 (23) , 1920-1922
- https://doi.org/10.1109/lpt.2008.2004790
Abstract
We demonstrate a carrier depletion phase modulator based on the hybrid silicon evanescent platform. A low temperature and robust bonding process is employed to transfer III-V epitaxial layers to patterned silicon waveguides. An external electric field is applied across the doped multiple quantum wells so that carriers are depleted, resulting in an index change. The device has a voltage-length product, V pi L, of 4 V-mm at 1550 nm. An optical bandwidth of 100 nm with an extinction ratio over 10 dB is achieved. The device can handle optical power up to 28 mW.Keywords
This publication has 14 references indexed in Scilit:
- Highly efficient vertical outgassing channels for low-temperature InP-to-silicon direct wafer bonding on the silicon-on-insulator substrateJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2008
- Periodic Loading and Selective Undercut Etching for High-Impedance Traveling-Wave Electroabsorption ModulatorsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2008
- A racetrack mode-locked silicon evanescent laserOptics Express, 2008
- InGaAlAs Multiple-Quantum-Well Optical Phase Modulators Based on Carrier DepletionIEEE Photonics Technology Letters, 2007
- A Hybrid AlGaInAs–Silicon Evanescent AmplifierIEEE Photonics Technology Letters, 2007
- A hybrid AlGaInAs-silicon evanescent preamplifier and photodetectorOptics Express, 2007
- 1310nm silicon evanescent laserOptics Express, 2007
- Micrometre-scale silicon electro-optic modulatorNature, 2005
- Raman gain and nonlinear optical absorption measurements in a low-loss silicon waveguideApplied Physics Letters, 2004
- InP/GaInAsP guided-wave phase modulators based on carrier-induced effects: theory and experimentJournal of Lightwave Technology, 1992