Magnetron sputtering of permalloy for thin-film heads
- 1 September 1984
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Magnetics
- Vol. 20 (5) , 851-853
- https://doi.org/10.1109/tmag.1984.1063356
Abstract
No abstract availableThis publication has 5 references indexed in Scilit:
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- The magnetic properties of r.f.-sputtered permalloy and Mumetal filmsThin Solid Films, 1981
- Facing targets type of sputtering method for deposition of magnetic metal films at low temperature and high rateIEEE Transactions on Magnetics, 1980
- Photoluminescence analysis of annealed silicon crystalsJournal of Applied Physics, 1980
- Coercive force of electrodeposited NiFe on top of conductors for SLM bubble device applicationsIEEE Transactions on Magnetics, 1978