Growth rate anisotropy and morphology of autoepitaxial silicon films from SiCl4
- 1 October 1974
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 23 (4) , 259-266
- https://doi.org/10.1016/0022-0248(74)90067-0
Abstract
No abstract availableThis publication has 23 references indexed in Scilit:
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