In Situ Preparation of Superconducting Bi2Sr2Can-1CunOy (n=1∼5) Thin Films by Molecular Beam Epitaxy Technique

Abstract
Superconducting Bi2Sr2Ca n-1Cu n O y (n=1∼5) thin films have been prepared in situ by molecular beam epitaxy with highly condensed ozone as oxidizing gas. All films including thermally metastable phases of n=4 and 5 were obtained by sequential shutter control, and even the n=1 phase film showed superconductivity. The surface of the n=1 phase film was observed by reflection high-energy electron diffraction, and the modulated structure was clearly observed.