Density Distribution in a Plasma Source with Cylindrical Configuration

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Abstract
The density distribution in a cylindrical plasma source is obtained by solving the diffusion equation based on a plasma model. In this model, the side wall of the cylindrical chamber is surrounded by magnetic multipole fields in order to obtain a uniform high-density plasma on a target wall. The form of the initial density distribution at the upper stream of the source is also discussed. Some calculated examples are shown. The results give the density distribution in the source and the plasma particle flux flowing into the target wall. The equations derived in this paper are useful for the design of a plasma source capable of generating a uniform high-density plasma over a wide area.