Study of Boron Implantation in Ag-Si Layer Structures
- 16 July 1982
- journal article
- research article
- Published by Wiley in Physica Status Solidi (a)
- Vol. 72 (1) , 369-373
- https://doi.org/10.1002/pssa.2210720138
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- A useful method for approximating the profile of ions implanted through a thin filmIEEE Transactions on Electron Devices, 1977
- Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92, E(4He) = 400–4000 keVAtomic Data and Nuclear Data Tables, 1974