A microcomputer-based deep level transient spectroscopy (DLTS) system

Publisher Website
Google Scholar
Abstract
A wide variety of experiments in semiconductor physics involve the analysis of transient phenomena resulting from the return of a system to electrical equilibrium. The essential data are the amplitude and the time constant of the transient. Deep level transient spectroscopy (DLTS) is a capacitance method for the study of deep impurities and defects in semiconductors. The DLTS apparatus described produces a sampled data record of the entire transient which may be analysed using linear regression by the method of least squares approximation. The system was applied to the investigation of deep traps in gradient freeze grown GaAs.