Observation of bulk tantalum oxide formation below 35 K
- 15 March 1987
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review B
- Vol. 35 (8) , 3740-3744
- https://doi.org/10.1103/physrevb.35.3740
Abstract
This paper describes the observation of bulk oxide formation near 35 K in a region where thermal diffusion cannot account for the oxide formation of bulk oxide. The data are discussed in terms of the Mott tunneling theory of oxidation, which is one of the explanations of low-temperature oxidation which emphasizes an electric-field-assisted diffusion mechanism.Keywords
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