Development of Tantalum Pentoxide Coatings by Chemical Vapor Deposition
- 1 September 1994
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 77 (9) , 2298-2304
- https://doi.org/10.1111/j.1151-2916.1994.tb04597.x
Abstract
No abstract availableKeywords
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