AFM probes with directly fabricated tips
- 1 March 1996
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 6 (1) , 58-62
- https://doi.org/10.1088/0960-1317/6/1/012
Abstract
Different fabrication technologies for atomic force microscopy (AFM) probes have been investigated, emphasizing the fabrication of versatile tip shapes, which can be integrated with micromachined cantilevers. By successive reactive ion etching processing steps, novel high-aspect-ratio tip shapes have been produced and integrated with AFM cantilevers. The performance of the fabricated tips has been investigated by scanning test structures in an atomic force microscope.Keywords
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