Characterization of porous Al2O3SiO2/Si sensor for low and medium humidity ranges
- 1 February 1995
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 23 (2-3) , 177-180
- https://doi.org/10.1016/0925-4005(94)01270-r
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- A humidity and hydrogen gas-sensitive polyimide-silicon diodeSensors and Actuators B: Chemical, 1993
- Sol-gel produced humidity sensorSensors and Actuators B: Chemical, 1993
- Microstructure and electrical properties of an α-hematite ceramic humidity sensorSensors and Actuators B: Chemical, 1992
- Conductance, work function and catalytic activity of SnO2-based gas sensorsSensors and Actuators B: Chemical, 1991
- Electrical properties of anodized aluminium in a humid atmosphereJournal of Materials Science, 1986