Microstructural Evolution of Epitaxial LiNbO3 Thin Films Derived From Metal Alkoxide Solutions
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
The evolution of the microstructure of sol-gel derived LiNbO3 thin films was investigated to understand the growth of epitaxial films. LiNbO3 films were prepared from a precursor solution of lithium ethoxide and niobium pentaethoxide. Prehydrolysis promoted the development of polycrys-talline LiNbO3 films, whereas nonhydrolysis produced solid-state epitaxial growth of LiNbO3 films on sapphire substrates. Although the films looked smooth after annealing at 400°C, the morphology of the films changed, depending on substrates and precursors, due to grain growth at high annealing temperature. Prehydrolysis of the alkoxides caused a decrease in the temperature at which grain growth occurred, whereas the film prepared from the nonhydrolyzed precursor on a sapphire substrate showed denser texture and contained abnormally large domains that appeared to be single phase.Keywords
This publication has 13 references indexed in Scilit:
- Preparation of Highly Oriented Li2B4O7 Films by Sol-Gel MethodJournal of the Ceramic Society of Japan, 1990
- Synthesis and Microstructure of Highly Oriented Lead Titanate Thin Films Prepared by a Sol‐Gel MethodJournal of the American Ceramic Society, 1989
- Single Crystal Zirconia Thin Films from Liquid PrecursorsMRS Proceedings, 1989
- Preparation of Crystalline LiNbO3Films with Preferred Orientation by Hydrolysis of Metal AlkoxidesAdvanced Ceramic Materials, 1988
- Sol-Gel Processing of Lithium Niobate Thin-Layers on SiliconMRS Proceedings, 1988
- Growth of thin-film lithium niobate by molecular beam epitaxyElectronics Letters, 1985
- Surface-energy-driven secondary grain growth in ultrathin (<100 nm) films of siliconApplied Physics Letters, 1984
- Liquid-phase-epitaxial growth of single-crystal LiNbO3 thin filmApplied Physics Letters, 1975
- Optical waveguides of single-crystal LiNbO3 film deposited by rf sputteringApplied Physics Letters, 1974
- Growth of LiNbO3 single-crystal film for optical waveguidesApplied Physics Letters, 1973