Ion implantation of carbon in diamond
- 31 December 1981
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research
- Vol. 191 (1-3) , 23-26
- https://doi.org/10.1016/0029-554x(81)90976-9
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- A channeling investigation of light-ion damage in diamondNuclear Instruments and Methods, 1980
- Implantation temperature for III–V compound semiconductorsJournal of Vacuum Science and Technology, 1978
- The diamond surface: II. Secondary electron emissionSurface Science, 1977
- The diamond surfaceSurface Science, 1977
- A semiempirical method of applying the dechanneling correction in the extraction of disorder distributionRadiation Effects, 1977
- On structural transitions in ion-implanted diamondRadiation Effects, 1974
- Semiconductor physics and channelingRadiation Effects, 1972
- Analysis of ion implanted diamondRadiation Effects, 1971
- Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline TargetsPhysical Review B, 1969