Redistribution of delta-doped Sb in Si
- 1 May 1991
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 111 (1-4) , 843-846
- https://doi.org/10.1016/0022-0248(91)91094-q
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Beryllium δ doping of GaAs grown by molecular beam epitaxyJournal of Applied Physics, 1990
- Influence of substrate orientation on surface segregation process in silicon-MBEThin Solid Films, 1989
- Structural characterization of an Sb delta-doping layer in siliconApplied Physics Letters, 1989
- Growth and characterization of atomic layer doping structures in SiJournal of Applied Physics, 1989
- Diffusion from a Thin Layer into a Semi-Infinite Medium with Concentration Dependent Diffusion CoefficientJournal of the Electrochemical Society, 1972