Thin Film Synthesis Using Miniature Pulsed Metal Vapor Vacuum arc Plasma Guns
- 1 January 1990
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 15 references indexed in Scilit:
- Transport of vacuum arc plasma through straight and curved magnetic ductsJournal of Applied Physics, 1989
- Review of ion-based coating processes derived from the cathodic arcJournal of Vacuum Science & Technology A, 1989
- Multiply stripped ion generation in the metal vapor vacuum arcJournal of Applied Physics, 1988
- Multilayers For X-Ray OpticsOptical Engineering, 1986
- Metal vapor vacuum arc ion sourceReview of Scientific Instruments, 1986
- Fast deposition of metallurgical coatings and production of surface alloys using a pulsed high current vacuum arcThin Solid Films, 1986
- Plasma flux motion in a toroidal plasma guidePlasma Physics and Controlled Fusion, 1986
- High current ion sourceApplied Physics Letters, 1985
- Thin Film ProcessesJournal of the Electrochemical Society, 1980
- The cathode spot of a vacuum arcSoviet Physics Uspekhi, 1978