Si-based surface-relief polygonal gratings for 1-to-many wafer scale optical clock signal distribution
- 1 August 1996
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Photonics Technology Letters
- Vol. 8 (8) , 1038-1040
- https://doi.org/10.1109/68.508730
Abstract
In contrast to volume holographic material where 1-to-many fanouts are realized using multiplexed volume holograms, we report in this paper the first Si-based surface-relief polygonal gratings aiming at optical clock signal distribution application. Surface-relief gratings with 1-/spl mu/m period (0.5 /spl mu/m feature size) were fabricated using reactive ion beam etching (RIE). Both hexagonal and square gratings were demonstrated for 1-to-4 and 1-to-6 fanouts. Surface-normal input and output coupling schemes were carried out with an combined coupling efficiency of 65%. Employment of substrate modes in silicon greatly releases the required grating spacing for the demonstrated two-way surface-normal coupling. 7.5 GHz 1-to-4 clock signal distribution operating at 1.3 /spl mu/m was demonstrated with a signal-to-noise ratio as high as 60 dB. The intensity fluctuation among fanout beams was measured to be within 1 dB. Generalization of 1-to-many fanout can be realized by implementing a polygonal grating with an equivalent number of facets.Keywords
This publication has 10 references indexed in Scilit:
- 1-to-42 optoelectronic interconnection for intra-multichip-module clock signal distributionApplied Physics Letters, 1994
- Homogeneous layer models for high-spatial-frequency dielectric surface-relief gratings: conical diffraction and antireflection designsApplied Optics, 1994
- Synchronous global clock distribution on multichip modules using optical waveguidesOptical Engineering, 1994
- Polymer-based photonic integrated circuitsOptics & Laser Technology, 1993
- Prototype optically interconnected multichip module based on computer-generated hologram technologyPublished by SPIE-Intl Soc Optical Eng ,1993
- Design and fabrication of high-efficiency beam splitters and beam deflectors for integrated planar micro-optic systemsApplied Optics, 1993
- Alignment and fabrication tolerances of planar gratings for board-to-board optical interconnectsApplied Optics, 1992
- Analysis and applications of optical diffraction by gratingsProceedings of the IEEE, 1985
- Rectangular-profile diffraction grating from single-crystal siliconApplied Optics, 1980
- Light Waves in Thin Films and Integrated OpticsApplied Optics, 1971