Photoconductive Polycrystalline Silicon Films on Glass Obtained by Hot-Wire CVD
- 1 January 1996
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Investigation of polycrystalline silicon deposition on glass substratesSolar Energy Materials and Solar Cells, 1993
- Hydrogen diffusion in polycrystalline silicon thin filmsApplied Physics Letters, 1992