On the formation of β-SiC from pyrolysis of CH3SiCl3 in hydrogen
- 31 January 1972
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 12 (1) , 13-16
- https://doi.org/10.1016/0022-0248(72)90331-4
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Kinetics of vapour-phase epitaxial growth of GaAs1−PJournal of Crystal Growth, 1972
- The Role of Homogeneous Reactions in Chemical Vapor DepositionJournal of the Electrochemical Society, 1971
- Pyrolytic Deposits of Silicon CarbideNature, 1966
- Electronic Conduction in Silicon CarbideThe Journal of Chemical Physics, 1953