Accuracy of profile measurements by means of a focused laser beam
- 1 November 1984
- Vol. 98, 117-126
- https://doi.org/10.1016/0043-1648(84)90221-7
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
- Optical profilometer: a practical approximate method of analysisApplied Optics, 1983
- Optical profilometer: a new method for high sensitivity and wide dynamic rangeApplied Optics, 1982
- Surface profile measurement using the confocal microscopeJournal of Applied Physics, 1982
- A fast versatile optical profilometerOptics Communications, 1979