Ion Implantation Disorder in Strained-Layer Superlattices
- 1 January 1984
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Structural integrity of ion-implanted In0.2Ga0.8As/GaAs strained-layer superlatticeApplied Physics Letters, 1984
- Compaction of ion-implanted fused silicaJournal of Applied Physics, 1974
- Anomalous Diffusion of Defects in Ion-Implanted GaAsPublished by Springer Nature ,1971