Quasianalog accelerometer using microswitch array
- 30 June 1996
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 54 (1-3) , 574-578
- https://doi.org/10.1016/s0924-4247(97)80017-9
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Galvanoplating and sacrificial layers for surface micromachiningMicroelectronic Engineering, 1995
- A surface micromachined silicon accelerometer with on-chip detection circuitrySensors and Actuators A: Physical, 1994
- Fabrication and characterization of silicon micromachined threshold accelerometersSensors and Actuators A: Physical, 1991