Galvanoplating and sacrificial layers for surface micromachining
- 28 February 1995
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 27 (1-4) , 503-508
- https://doi.org/10.1016/0167-9317(94)00154-m
Abstract
No abstract availableKeywords
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- Electrodeposition of 3D microstructures on siliconJournal of Micromechanics and Microengineering, 1993
- Fabrication of magnetic microstructures by using thick layer resistsMicroelectronic Engineering, 1993
- High depth to width aspect ratios in thick positive photoresist layers using near UV lithographyMicroelectronic Engineering, 1992