Atomic collision processes in sputtering
- 1 January 1980
- journal article
- research article
- Published by Taylor & Francis in Radiation Effects
- Vol. 46 (3-4) , 163-165
- https://doi.org/10.1080/00337578008209166
Abstract
The time-of-flight spectra of sputtered atoms from gold crystals bombarded with 20 keV Ar+ ions are reported. The discussion shows the effect of channelling, direct and once-deflected recoils from the surface and focused collisions along and directions.Keywords
This publication has 3 references indexed in Scilit:
- The effect of surface recoils on the energy distribution of sputtered goldNuclear Instruments and Methods, 1976
- The energy distribution of sputtered atoms from goldRadiation Effects, 1972
- III. Energy spectra for copperPhilosophical Magazine, 1968