Amorphous to Polysilicon growth and “Sunflower Effect” Observed in Catalytic-CVD
- 1 January 1994
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Properties and Production Mechanism of Low-Temperature Deposited CAT-CVD Poly-Silicon filmsMRS Proceedings, 1992
- Formation of Polysilicon Films by Catalytic Chemical Vapor Deposition (cat-CVD) MethodJapanese Journal of Applied Physics, 1991
- Study on catalytic chemical vapor deposition method to prepare hydrogenated amorphous siliconJournal of Applied Physics, 1989