HRTEM observation of the Si/SiO2 interface
- 1 January 1990
- journal article
- Published by Elsevier in Applied Surface Science
- Vol. 41-42, 357-364
- https://doi.org/10.1016/0169-4332(89)90085-8
Abstract
No abstract availableFunding Information
- Ministry of Education, Culture, Sports, Science and Technology
This publication has 6 references indexed in Scilit:
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- The structural models of the Si/SiO2 interfaceJournal of Non-Crystalline Solids, 1987
- Computer simulation of high-resolution transmission electron microscopy images of Si/SiO2 interfacesJournal of Applied Physics, 1986
- Surface roughness at the Si(100)-interfacePhysical Review B, 1985
- Si/SiO2 interface roughness: Structural observations and electrical consequencesApplied Physics Letters, 1985
- Valley splitting and related phenomena in si inversion layersSurface Science, 1980