Copper in silicon
- 15 October 1990
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review Letters
- Vol. 65 (16) , 2023-2026
- https://doi.org/10.1103/physrevlett.65.2023
Abstract
The presence of Cu atoms in p-type Si is detected via their characteristic electric-field gradients measured at the radioactive acceptor Cd by the perturbed γγ angular correlation technique. Cu forms pairs with acceptor atoms, thereby electrically passivating them, and is present as a contamination in Si wafers. Using the experimentally known Cu diffusion data and taking into account the effect of ion pairing, a new activation energy of 0.15 eV is deduced, which is in accordance with the dissociation energy of 0.70 eV measured for Coulombic-bound-acceptor–Cu pairs.
Keywords
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