Iridium film growth with indium tris-acetylacetonate: oxygen and substrate effects
- 1 June 1999
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 346 (1-2) , 100-107
- https://doi.org/10.1016/s0040-6090(98)01458-8
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Epitaxial growth of iridium and platinum films on sapphire by metalorganic chemical vapor depositionApplied Physics Letters, 1994
- Growth of iridium films by metal organic chemical vapour depositionThin Solid Films, 1994
- Effect of the deposition temperature on the iridum film microstructure produced by metal-organic chemical vapour deposition: sample characterization using x-ray techniquesThin Solid Films, 1993
- An XPS study of the composition of iridium films obtained by MO CVDSurface Science, 1992
- The chemisorption of oxygen on the (110) surface of iridium∗Surface Science, 1979