Conducting atomic-force-microscope electrical characterization of submicron magnetic tunnel junctions
- 23 June 2003
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (25) , 4522-4524
- https://doi.org/10.1063/1.1582375
Abstract
We have developed the ability to electrically characterize submicron magnetic tunnel junctions using a conducting atomic force microscope (CAFM). This technique can be applied after only a short processing route, thereby saving time and resources, and reducing the potential for damaging the junctions. The CAFM can be used to measure hysteresis loops, magnetoresistance, resistance–area product, switching astroids, current–voltage curves, and breakdown voltage of tunnel junctions. In this letter, we outline the sample requirements, detail the CAFM processing route, describe tip preparation, and report examples of data we have obtained with this technique over the last two years.Keywords
This publication has 10 references indexed in Scilit:
- Magnetoresistance and Dipole Shift of Ultrasmall Magnetic Tunnel Junctions Characterized by Conducting Atomic Force MicroscopyJapanese Journal of Applied Physics, 2002
- Low resistance and high thermal stability of spin-dependent tunnel junctions with synthetic antiferromagnetic CoFe/Ru/CoFe pinned layersApplied Physics Letters, 2000
- SPIN-TUNNELING IN FERROMAGNETIC JUNCTIONSAnnual Review of Materials Science, 1999
- Exchange-biased magnetic tunnel junctions and application to nonvolatile magnetic random access memory (invited)Journal of Applied Physics, 1999
- Shape-anisotropy-controlled magnetoresistive response in magnetic tunnel junctionsApplied Physics Letters, 1997
- Reactive Ion Etching of RuO2 Films: The Role of Additive Gases in O2 DischargePhysica Status Solidi (a), 1997
- Microstructured magnetic tunnel junctions (invited)Journal of Applied Physics, 1997
- Large Magnetoresistance at Room Temperature in Ferromagnetic Thin Film Tunnel JunctionsPhysical Review Letters, 1995
- Giant magnetic tunneling effect in Fe/Al2O3/Fe junctionJournal of Magnetism and Magnetic Materials, 1995
- Potentiometry Combined with Atomic Force MicroscopeJapanese Journal of Applied Physics, 1994