State-selective spectroscopic detection of reaction products (SiH2, Si) in the IR laser decomposition of SiH4
- 30 September 1988
- journal article
- Published by Elsevier in Chemical Physics Letters
- Vol. 150 (5) , 542-546
- https://doi.org/10.1016/0009-2614(88)87244-0
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Frequency and time resolved luminescence of intermediate reaction products in ir laser decomposition of silaneApplied Physics B Laser and Optics, 1988
- Dissociation dynamics of low-lying electronic states of SiH2The Journal of Chemical Physics, 1988
- Production of silicon(1D2) from electronically excited silyleneThe Journal of Physical Chemistry, 1988
- Laser powered homogeneous pyrolysis of silaneChemical Physics Letters, 1985
- Some comments on kinetics and mechanism in the pyrolysis of monosilaneChemical Physics Letters, 1984
- A case for the importance of gas phase initiation and the absence of free radical processes in the thermal decomposition of silaneChemical Physics Letters, 1984
- A Mathematical Model of the Coupled Fluid Mechanics and Chemical Kinetics in a Chemical Vapor Deposition ReactorJournal of the Electrochemical Society, 1984
- Infrared multiphoton decomposition of monosilaneJournal of the American Chemical Society, 1981
- Kinetics and mechanism of amorphous hydrogenated silicon growth by homogeneous chemical vapor depositionApplied Physics Letters, 1981
- Glow discharge preparation of amorphous hydrogenated silicon from higher silanesApplied Physics Letters, 1980