Semiconductor Thin Films Grown by Laser Photolysis

This publication has 7 references indexed in Scilit:

• Detection of CF2 radicals in a plasma etching reactor by laser-induced fluorescence spectroscopy
  Applied Physics Letters, 1982
• Laser-induced chemical vapor deposition of SiO2
  Applied Physics Letters, 1982
• Low-temperature growth of polycrystalline Si and Ge films by ultraviolet laser photodissociation of silane and germane
  Applied Physics Letters, 1982
• Trace detection of N_2 by KrF-laser-excited spontaneous Raman spectroscopy
  Applied Optics, 1981
• Laser microphotochemistry for use in solid-state electronics
  IEEE Journal of Quantum Electronics, 1980
• Laser-induced vapor deposition of silicon
  Applied Physics Letters, 1979
• HF infrared chemiluminescence, energy partitioning, and D(H–GeH3) from the reaction of F atoms with germane
  The Journal of Chemical Physics, 1974