X-ray imaging of nanostructure patterns
- 16 January 1989
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 54 (3) , 286-288
- https://doi.org/10.1063/1.100990
Abstract
A Fresnel zone plate lens, with a nominal outer zone width of 400 Å, has been used to image nanostructures with soft x-ray synchrotron radiation at 45 Å wavelength with the Göttingen x-ray microscope at BESSY in Berlin. The structures, consisting of gold lines in thin silicon nitride membranes, were selected for tests of spatial resolution and image forming capabilities. Several patterns associated with deep submicron electronic circuits were also imaged, showing clearly resolved features smaller than 0.1 μm. Images of periodic structures, including 600 Å lines on 2000 Å centers, suggest a spatial resolution approaching the theoretical limit of approximately 500 Å.Keywords
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