Numerical ellipsometry: enhancement of new algorithm for real-time, in situ film growth monitoring
- 1 December 1994
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 253 (1-2) , 262-268
- https://doi.org/10.1016/0040-6090(94)90332-8
Abstract
No abstract availableThis publication has 6 references indexed in Scilit:
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