New piezoelectric Ta2O5 thin films
- 15 January 1985
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 46 (2) , 139-140
- https://doi.org/10.1063/1.95712
Abstract
Crystallized Ta2O5thin films have been deposited on fused quartz substrates by reactive dc diode sputtering. Crystalline structures and piezoelectric properties of the films were investigated. The electromechanical coupling coefficient K 2 of the surface acoustic waves was 0.5% for h k=1.0. This value is comparable to that for ZnO thin films.Keywords
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