Detailed index profiles of ion implanted waveguides in KNbO3

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Abstract
Planar optical waveguides have been produced in KNbO3, by He ion implantation at 2.0 MeV. The depth profiles for the two indices (na and nc) have been determined using a dark mode reflectivity calculation. They show a pronounced anisotropic behaviour. For a dose of 2 × 1016 cm−2 the nuclear damage peak has an index decrease ∼10% for na, and ∼7% for nc, showing a sensitivity to nuclear damage at least three times that of LiNbO3. The electronic damage region has ∼0.5% decrease for na, but an increase for nc which is larger at shorter wavelengths. This anisotropic and dispersive behaviour is comparable with other implanted niobates, and a similar damage mechanism of radiation-enhanced diffusion is suggested.

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