Fabrication of GaAs Quantum Wire Structures by Hydrogen-Assisted Molecular Beam Epitaxy

Abstract
GaAs Quantum wire structures have been fabricated by hydrogen-assisted molecular beam epitaxy on substrates having V-shaped grooves, the side walls of which consist of (111)A. The growth rate of GaAs on (111)A was significantly decreased by atomic hydrogen irradiation, while that on (001) was increased. The large difference in the growth rate between (001) and (111)A has been uniquely utilized for the fabrication of quantum wires. The existence of a quantum energy level in the quantum wire structures has been confirmed by photoluminescence (PL) measurement. The PL spectra showed a clear polarization dependence.