Microsystem technology: Between research and industrial application
- 1 March 1998
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 41-42, 47-52
- https://doi.org/10.1016/s0167-9317(98)00011-2
Abstract
No abstract availableKeywords
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- The nanoworld: chances and challengesMicroelectronic Engineering, 1996
- High-density data storage using proximal probe techniquesIBM Journal of Research and Development, 1995