Auger spectroscopy analysis of palladium silicide films
- 15 April 1975
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 26 (8) , 433-435
- https://doi.org/10.1063/1.88199
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
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- Metallurgical properties and electrical characteristics of palladium silicide-silicon contactsSolid-State Electronics, 1971
- The influence of the band structure on the Auger electron spectrum of siliconJournal of Physics C: Solid State Physics, 1971
- Auger electron spectroscopy of SiSurface Science, 1970
- Auger spectroscopy of siliconSurface Science, 1969