Deposition of diamond-like carbon

15 February 1993

journal article
Published by The Royal Society in Philosophical Transactions A

Vol. 342 (1664) , 277-286
https://doi.org/10.1098/rsta.1993.0021

Abstract

Diamond-like carbon refers to forms of amorphous carbon and hydrogenated amorphous carbon containing a sizeable fraction of sp³bonding, which makes them mechanically hard, infrared transparent and chemically inert. This paper discusses the various thin film deposition processes used to form diamond-like carbon and the deposition mechanisms responsible for promoting the metastable sp³bonding.

Keywords

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