Synthesis of titanium nitride films by ion-beam- enhanced-deposition

This publication has 4 references indexed in Scilit:

• Titanium Nitride Crystal Growth with Preferred Orientation by Dynamic Mixing Method
  Japanese Journal of Applied Physics, 1987
• Ion-Beam-Assisted Deposition and Synthesis
  MRS Bulletin, 1987
• Coating Films of Titanium Nitride Prepared by Ion and Vapor Deposition Method
  Japanese Journal of Applied Physics, 1985
• Adherent TiN films produced by ion beam enhanced deposition at room temperature
  Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1985