Low energy ion irradiation of H-terminated Si(001): hydrogen sputtering, beam-induced (2 × 1) reconstruction, and Si epitaxy
- 1 August 1995
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 102 (1-4) , 293-300
- https://doi.org/10.1016/0168-583x(95)80156-g
Abstract
No abstract availableKeywords
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