The thermal decomposition of triethylgallium on GaAs(100)
- 1 January 1990
- Vol. 41 (4-6) , 955-957
- https://doi.org/10.1016/0042-207x(90)93832-4
Abstract
No abstract availableKeywords
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- A model for the surface chemical kinetics of GaAs deposition by chemical-beam epitaxyJournal of Applied Physics, 1988
- High-resolution electron-energy-loss spectroscopy studies of GaAs (100) surfacesJournal of Vacuum Science & Technology B, 1987
- Metalorganic Chemical Vapor DepositionAnnual Review of Materials Science, 1982