Co-integration of GaAlAs/GaAs HBTs and GaAs FETs with a simple, manufacturable process

Abstract
This paper describes a simple approach for the integration of GaAlAs/GaAs HBTs and MESFETs on the same wafer. Our approach is based on using a GaAs layer on top of the HBT emitter region as the FET channel, which is integrated with only a small extension of the standard HBT process. Transconductance reaches 400 mS/mm for 1 mu m gate length devices while f/sub t/ and f/sub max/ are as high as 11 and 13 GHz, respectively.

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