On the Construction of a Zerodur Translation Device for X-Ray Interferometric Scanning
- 1 January 1986
- journal article
- Published by IOP Publishing in Metrologia
- Vol. 22 (1) , 55-63
- https://doi.org/10.1088/0026-1394/22/1/004
Abstract
A finite-element method was applied in designing a mechanical device for X-ray fringe scanning over a distance of about 50 μm with a pitch angle of some milliseconds of arc. With this method it was possible to detect critical parameters in the hinges of the device, as well as points where the pitch angle is nil. A Zerodur prototype was constructed, and measurements carried out on it with an autocollimator confirmed that zero-pitch points were correctly predicted by the calculation programme.Keywords
This publication has 5 references indexed in Scilit:
- The Dynamic Properties of a Monolithic Mechanism with Notch Flexure Hinges for Precision Control of Orientation and PositionJapanese Journal of Applied Physics, 1983
- X-Ray to Visible Wavelength RatiosPhysical Review Letters, 1973
- OPTICAL AND X-RAY INTERFEROMETRY OF A SILICON LATTICE SPACINGApplied Physics Letters, 1969
- Parallel movement for high finesse interferometric scanningJournal of Scientific Instruments, 1962
- Some parasitic deflexions in parallel spring movementsJournal of Scientific Instruments, 1956