Ultra-stable, high-temperature pressure sensors using silicon fusion bonding
- 1 February 1990
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 21 (1-3) , 96-101
- https://doi.org/10.1016/0924-4247(90)85019-z
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Single-crysytal silicon pressure sensors with 500 × overpressure protectionSensors and Actuators A: Physical, 1990
- Bonding of silicon wafers for silicon-on-insulatorJournal of Applied Physics, 1988
- A Field‐Assisted Bonding Process for Silicon Dielectric IsolationJournal of the Electrochemical Society, 1986