Kinetics of Rapid Thermal Oxidation of Silicon
- 1 January 1987
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Thermal Oxidation of Silicon in Dry Oxygen: Accurate Determination of the Kinetic Rate ConstantsJournal of the Electrochemical Society, 1985
- The Effects of Trace Amounts of Water on the Thermal Oxidation of Silicon in OxygenJournal of the Electrochemical Society, 1974
- Ultraviolet-Enhanced Oxidation of SiliconJournal of Applied Physics, 1971